Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018243 | Measurement signal processing | Christian Fritsch, Christoph Obrecht | 2011-09-13 |
| 7981306 | Supplying RF power to a plasma process | Manfred Blattner, Markus Winterhalter | 2011-07-19 |