Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048591 | Mask blank glass substrate, mask blank glass substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Yasushi Okubo | 2011-11-01 |
| 8021804 | Photomask manufacturing method | Yasushi Okubo | 2011-09-20 |
| 7955763 | Mask blank glass substrate manufacturing method, mask blank manufacturing method, mask manufacturing method, mask blank glass substrate, mask blank, and mask | Akinori Kurikawa, Yasushi Okubo | 2011-06-07 |