Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7916447 | Electrostatic chuck for substrate stage, electrode used for the chuck, and treating system having the chuck and electrode | Katsuhiko Iwabuchi | 2011-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7916447 | Electrostatic chuck for substrate stage, electrode used for the chuck, and treating system having the chuck and electrode | Katsuhiko Iwabuchi | 2011-03-29 |