Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072608 | Apparatus and method for a combined interferometric and image based geometric determination, particularly in the microsystem technology | Norbert Steffens | 2011-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072608 | Apparatus and method for a combined interferometric and image based geometric determination, particularly in the microsystem technology | Norbert Steffens | 2011-12-06 |