Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972886 | Method of manufacturing micro electro mechanical systems device | Heewon Jeong, Yasushi Goto, Yuko Hanaoka | 2011-07-05 |
| 7919814 | Semiconductor device with integrated circuit electrically connected to a MEMS sensor by a through-electrode | Yasushi Goto, Heewon Jeong, Kiyoko Yamanaka | 2011-04-05 |