Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084925 | Piezoelectric thin film elemental device, sensor and actuator | Kenji Shibata, Kazufumi Suenaga | 2011-12-27 |
| 8063543 | Piezoelectric thin film element including upper and lower electrodes, and an actuator and a sensor fabricated by using the same | Kenji Shibata | 2011-11-22 |
| 8058779 | Piezoelectric thin film element | Kazufumi Suenaga, Kenji Shibata, Hideki Sato | 2011-11-15 |
| 8035281 | Physical quantity detecting sensor and actuator | Kenji Shibata | 2011-10-11 |
| 8004163 | Substrate with a piezoelectric thin film | Kenji Shibata | 2011-08-23 |
| 7902730 | Piezoelectric thin film device | Kenji Shibata | 2011-03-08 |
| 7901800 | Piezoelectric element | Kenji Shibata | 2011-03-08 |
| 7884531 | Piezoelectric thin film device | Kenji Shibata | 2011-02-08 |