Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084315 | Method of fabricating non-volatile semiconductor memory device by using plasma film-forming method and plasma nitridation | Katsuhiko Yamamoto, Yoshiki Yonamoto, Hirotaka Hamamura | 2011-12-27 |
| 8071446 | Manufacturing method of semiconductor device and substrate processing apparatus | — | 2011-12-06 |
| 8066894 | Substrate processing method and substrate processing apparatus | Tatsushi UEDA, Unryu Ogawa, Akito Hirano | 2011-11-29 |