Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043438 | Device for cleaning CVD device and method of cleaning CVD device | Katsuo Sakai, Kaoru Abe, Seiji Okura, Masaji Sakamura, Kenji Kameda +2 more | 2011-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043438 | Device for cleaning CVD device and method of cleaning CVD device | Katsuo Sakai, Kaoru Abe, Seiji Okura, Masaji Sakamura, Kenji Kameda +2 more | 2011-10-25 |