Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033770 | Vacuum processing apparatus | Takeshi Oono, Kenji Nakata, Shoji Okiguchi, Tooru Ueno, Shigeharu Minami +1 more | 2011-10-11 |
| 7862289 | Vacuum processing apparatus and vacuum processing method | Takeshi Oono, Kenji Nakata, Shoji Okiguchi, Tooru Ueno, Shigeharu Minami +1 more | 2011-01-04 |