Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8031344 | Z-stage configuration and application thereof | You-Jin Wang | 2011-10-04 |
| 7868303 | Method and handling apparatus for placing patterning device on support member for charged particle beam imaging | You-Jin Wang, Hsuan-Bin Huang | 2011-01-11 |