Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017536 | Component of quartz glass for use in semiconductor manufacture and method for producing the same | Juergen Weber, Tatsuhiro Sato, Ralf Schneider, Achim Hofmann | 2011-09-13 |