Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7903336 | Optical metrological scale and laser-based manufacturing method therefor | Kurt Pelsue, Stuart A. Dodson, II, Donald V. Smart, Pierre-Yves Mabboux, Jonathan S. Ehrmann | 2011-03-08 |
| 7898204 | High-speed substrate manipulator | — | 2011-03-01 |