Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993496 | Cylindrical target with oscillating magnet for magnetron sputtering | Klaus Hartig, Steve E. Smith | 2011-08-09 |
| 7932678 | Magnetic mirror plasma source and method using same | — | 2011-04-26 |