Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048600 | Parameter extracting method | — | 2011-11-01 |
| 8022376 | Method for manufacturing semiconductor device or photomask | Takashi Maruyama | 2011-09-20 |
| 7977018 | Exposure data preparation method and exposure method | Yasuhide Machida | 2011-07-12 |
| 7939246 | Charged particle beam projection method | — | 2011-05-10 |