Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8044447 | Semiconductor device and method for manufacturing the same | Genichi Komuro | 2011-10-25 |
| 8034676 | Semiconductor device and method of manufacturing the same | — | 2011-10-11 |
| 7906033 | Plasma etching method and apparatus | Yuuichi Tachino, Minoru Suzuki, Koji Ibi, Genichi Komuro | 2011-03-15 |