Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8073241 | Defect source analysis method, defect source analysis apparatus, and method of manufacturing semiconductor device | Atsuo Fushida, Yasuhiro Suzuki, Akihiro Shimada | 2011-12-06 |