| 8018118 |
Micro-oscillation element provided with weight portion, and array utilizing the same |
Osamu Tsuboi, Norinao Kouma, Hiromitsu Soneda, Yoshihiro Mizuno, Tsuyoshi Matsumoto +1 more |
2011-09-13 |
| 7952033 |
Microstructure and microstructure manufacture method |
Yoshihiro Mizuno, Norinao Kouma, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi |
2011-05-31 |
| 7948056 |
Integrated electronic device and method of making the same |
Xiaoyu Mi, Yoshihiro Mizuno, Tsuyoshi Matsumoto, Satoshi Ueda, Takeo Takahashi |
2011-05-24 |
| 7906822 |
Packaged device and method of manufacturing the same |
Yoshihiro Mizuno, Norinao Kouma, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi |
2011-03-15 |
| 7903315 |
Micro oscillating device |
Osamu Tsuboi, Norinao Kouma, Yoshihiro Mizuno, Hiromitsu Soneda, Tsuyoshi Matsumoto |
2011-03-08 |
| 7903313 |
Micro movable element |
Yoshihiro Mizuno, Norinao Kouma, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi |
2011-03-08 |
| 7893596 |
Micro movable element and micro movable element array |
Osamu Tsuboi, Norinao Kouma, Yoshihiro Mizuno, Hiromitsu Soneda, Tsuyoshi Matsumoto |
2011-02-22 |
| 7880951 |
Micro oscillating device and micro oscillating device array |
Osamu Tsuboi, Norinao Kouma, Hiromitsu Soneda, Yoshihiro Mizuno, Tsuyoshi Matsumoto |
2011-02-01 |
| 7871687 |
Method of making microstructure device, and microstructure device made by the same |
Norinao Kouma, Yoshihiro Mizuno, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi +1 more |
2011-01-18 |
