Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066857 | Shaped anode and anode-shield connection for vacuum physical vapor deposition | Youming Li | 2011-11-29 |
| 8053951 | Thin film piezoelectric actuators | Youming Li | 2011-11-08 |
| 8043487 | Chamber shield for vacuum physical vapor deposition | Youming Li | 2011-10-25 |