Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8025729 | Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer | Manfred Jurisch, Stefan Eichler, Thomas Bünger, Frank Börner | 2011-09-27 |