Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002954 | Process and apparatus for purifying silicon tetrachloride or germanium tetrachloride containing hydrogen compounds | Hanns-Peter Popp, Rainer Nicolai, Jurgen Lang | 2011-08-23 |