Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021515 | Inductively coupled plasma processing apparatus | Pascal Colpo, Reinhard Fendler | 2011-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021515 | Inductively coupled plasma processing apparatus | Pascal Colpo, Reinhard Fendler | 2011-09-20 |