Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030221 | Method for producing low-k l film, semiconductor device, and method for manufacturing the same | Takamaro Kikkawa | 2011-10-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030221 | Method for producing low-k l film, semiconductor device, and method for manufacturing the same | Takamaro Kikkawa | 2011-10-04 |