Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7886449 | Flexure guide bearing for short stroke stage | — | 2011-02-15 |
| 7889322 | Specimen inspection stage implemented with processing stage coupling mechanism | Robert A. Ferguson, Jeremy Willey | 2011-02-15 |