Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002607 | Polishing apparatus and polishing method | Akira Fukuda, Kazuto Hirokawa | 2011-08-23 |
| 7976358 | Polishing apparatus and polishing method | Akira Fukuda, Kazuto Hirokawa | 2011-07-12 |
| 7967660 | Polishing apparatus and polishing method | Akira Fukuda, Kazuto Hirokawa | 2011-06-28 |