Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078419 | Polishing monitoring method and polishing apparatus | Taro Takahashi, Yasumasa Hiroo, Akihiko Ogawa, Shinrou Ohta | 2011-12-13 |
| 7960188 | Polishing method | Shinrou Ohta, Mitsuo Tada, Noburu Shimizu, Taro Takahashi, Eisaku Hayashi +3 more | 2011-06-14 |