Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968465 | Periodic acid compositions for polishing ruthenium/low K substrates | Robert Small, Haruki Nojo, Kenichi Orui, Atsushi Hayashida | 2011-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968465 | Periodic acid compositions for polishing ruthenium/low K substrates | Robert Small, Haruki Nojo, Kenichi Orui, Atsushi Hayashida | 2011-06-28 |