Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071413 | Micro-electro-mechanical system (MEMS) sensor and method for making same | — | 2011-12-06 |
| 8003422 | Micro-electro-mechanical system device and method for making same | Sheng-Ta Lee | 2011-08-23 |
| 7989246 | Package method of micro-electro-mechanical system chip | — | 2011-08-02 |
| 7989247 | In-plane sensor and method for making same | Sheng-Ta Lee | 2011-08-02 |
| 7897506 | Micro-electro-mechanical-system device with particles blocking function and method for making same | Sheng-Ta Lee | 2011-03-01 |