Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7956994 | Measurement apparatus for measuring transmittance distribution of optical system | — | 2011-06-07 |
| 7889319 | Exposure apparatus and device fabrication method | Shinichiro Hirai | 2011-02-15 |