Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7883630 | FIB milling of copper over organic dielectrics | Vladimir Makarov | 2011-02-08 |
| 7884024 | Apparatus and method for optical interference fringe based integrated circuit processing | Erwan Le Roy, Chun-Cheng Tsao, Rajesh Jain | 2011-02-08 |