Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7929139 | Spectroscopic ellipsometer, film thickness measuring apparatus, and method of focusing in spectroscopic ellipsometer | Masahiro Horie | 2011-04-19 |
| 7864318 | Spectroscopic ellipsometer and ellipsometry | — | 2011-01-04 |