Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7931820 | Dry etching gas and method for dry etching | Masataka Hirose, Shingo Nakamura, Hirokazu Aoyama | 2011-04-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7931820 | Dry etching gas and method for dry etching | Masataka Hirose, Shingo Nakamura, Hirokazu Aoyama | 2011-04-26 |