Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017289 | Method for manufacturing a surface and integrated circuit using variable shaped beam lithography | Akira Fujimura | 2011-09-13 |
| 7981575 | Method for optical proximity correction of a reticle to be manufactured using variable shaped beam lithography | Akira Fujimura | 2011-07-19 |
| 7901845 | Method for optical proximity correction of a reticle to be manufactured using character projection lithography | Akira Fujimura, Takashi Mitsuhashi, Kazuyuki Hagiwara | 2011-03-08 |
| 7901850 | Method and system for design of a reticle to be manufactured using variable shaped beam lithography | Akira Fujimura | 2011-03-08 |