Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8032845 | Correcting 3D effects in phase shifting masks using sub-resolution features | Vishnu G. Kamat | 2011-10-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8032845 | Correcting 3D effects in phase shifting masks using sub-resolution features | Vishnu G. Kamat | 2011-10-04 |