Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906446 | Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same | Dana Craig Bookbinder, Ulrich Wilhelm Heinz Neukirch, Charlene Marie Smith | 2011-03-15 |