Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932118 | Method of producing mechanical components of MEMS or NEMS structures made of monocrystalline silicon | Philippe Robert | 2011-04-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932118 | Method of producing mechanical components of MEMS or NEMS structures made of monocrystalline silicon | Philippe Robert | 2011-04-26 |