Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8031341 | Optical detection structure for a plasmon resonance sensor | Pierre Barritault, Gilles Grand | 2011-10-04 |
| 7927765 | Adjustable mask blank structure for an EUV phase-shift mask | — | 2011-04-19 |