Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026165 | Process for producing air gaps in microstructures, especially of the air gap interconnect structure type for integrated circuits | — | 2011-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026165 | Process for producing air gaps in microstructures, especially of the air gap interconnect structure type for integrated circuits | — | 2011-09-27 |