Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7956142 | Polymerizable sulfonic acid onium salt and resin | Tomoki Nagai, Takuma Ebata, Makoto Shimizu, Satoru Narizuka, Masaki Fujiwara | 2011-06-07 |
| 7906269 | Positive-type resist composition | Yoshimi Isono, Satoru Narizuka, Kazuhiro Yamanaka | 2011-03-15 |
| 7887990 | Fluorine-containing compound, fluorine-containing polymer, postive-type resist composition, and patterning process using same | Yoshimi Isono, Satoru Narizuka | 2011-02-15 |