Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947422 | Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions | Shinichi Sumida, Kazuhiko Maeda | 2011-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947422 | Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions | Shinichi Sumida, Kazuhiko Maeda | 2011-05-24 |