Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071944 | Portable electron microscope using micro-column | Byeng Jin Kim | 2011-12-06 |
| 8071955 | Magnetic deflector for an electron column | Young Chul Kim | 2011-12-06 |
| 8044351 | Micro-column with simple structure | Byeng Jin Kim | 2011-10-25 |
| 7968844 | Hole inspection apparatus and hole inspection method using the same | — | 2011-06-28 |
| 7935926 | Inspection equipment for fine pattern and morphology using microcolumn | — | 2011-05-03 |
| 7902521 | Method for focusing electron beam in electron column | Seung-Joon Ahn, Dae Wook Kim, Young Chul Kim | 2011-03-08 |