Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004690 | Device and method for the optical measurement of an optical system, measurement structure support, and microlithographic projection exposure apparatus | — | 2011-08-23 |
| 7911624 | Device and method for the interferometric measurement of phase masks | Helmut Haidner | 2011-03-22 |