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Markus Brotsack

CG Carl Zeiss Smt Gmbh: 1 patents #56 of 183Top 35%
Overall (2011): #230,308 of 364,097Top 65%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7884922 Illumination system for microlithography — 2011-02-08