Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049964 | Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element | Christoph Zaczek | 2011-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049964 | Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element | Christoph Zaczek | 2011-11-01 |