Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072579 | Measuring method, adjustment method for stage movement characteristics, exposure method, and device manufacturing method | — | 2011-12-06 |
YT
Yusuke Tokuyama
Overall (2011): #118,444 of 364,097Top 35%
1
Patents 2011