Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7956987 | Measurement apparatus, exposure apparatus, and device manufacturing method | — | 2011-06-07 |
YO
Yumiko Ohsaki
Overall (2011): #119,029 of 364,097Top 35%
1
Patents 2011