Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998324 | Sputtering target and process for producing si oxide film therewith | Koichi Watanabe, Takashi Ishigami | 2011-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998324 | Sputtering target and process for producing si oxide film therewith | Koichi Watanabe, Takashi Ishigami | 2011-08-16 |