Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064152 | Supporting device, optical apparatus, exposure apparatus, and device manufacturing method | — | 2011-11-22 |
YS
Yuji Sudoh
Overall (2011): #118,662 of 364,097Top 35%
1
Patents 2011