Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8031328 | Positioning apparatus | Tosiya Asano, Atsushi Kimura | 2011-10-04 |
| 7932646 | Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield | — | 2011-04-26 |
| 7880864 | Stage apparatus, exposure apparatus, and device manufacturing method | — | 2011-02-01 |