Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7894039 | Exposure apparatus and method, and device manufacturing method | Ryuhei Miyashiro | 2011-02-22 |
YF
Youzou Fukagawa
Overall (2011): #124,010 of 364,097Top 35%
1
Patents 2011