Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7995213 | Measurement method, measurement apparatus, exposure apparatus, and device fabrication method | Osamu Kakuchi | 2011-08-09 |
| 7910871 | Injection-locked laser, interferometer, exposure apparatus, and device manufacturing method | — | 2011-03-22 |
| 7907263 | Apparatuses and methods using measurement of a flare generated in an optical system | Michiko Aizawa, Eiji Aoki, Osamu Kakuchi | 2011-03-15 |